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Turcon® Variseal® in Semiconductor Industry
Field-proven in extreme gas and liquid handling situations, a number of variations of Turcon® Variseal® spring-energized seals are especially suited to the most demanding of semiconductor sealing applications, including high vacuum and corrosive environments.
Turcon® Variseal® NW
The Turcon® case of this flange seal encompasses the energizing spring in such a way that there can be no possible contact between the spring or spring cavity and system media. It is ideal for semiconductor applications where it can successfully operate in a vacuum and is proven in fluorine gas.
Features of the Turcon® Variseal® NW seal:
- Operates in extreme temperatures from -253 °C/ -423 °F to +260 °C/ +500 °F
- Vacuum capability in air to 10-9mbar/ l/s
- Excellent wear and friction characteristics
- Compatible with virtually all media and gases including fluorine gas at high temperature
- Available in custom sizes and standard dimensions with easy retrofit of current NW elastomer seals
Turcon® Variseal® PS™
This high-performance seal has been designed with a Turcon® PTFE based sealing body and encompasses a polymeric spring. Using the system media pressure, it is engineered to energize the seal precisely at low pressures, while maintaining high-pressure sealing integrity. The Turcon® Variseal® PS™ has ultra-low leach out impurities as per SEMI standard F57-0301 and minimal outgassing, making it ideal for use in semiconductor wet processing.
Features of the Turcon® Variseal® PS™ seal:
- Ultra-low leach out and no outgassing
- Thermal stability from -253 °C/ -423 °F to +80 °C/ +176 °F
- Vacuum sealing 5.3 x 10-8 mbar/l/s-1 (4.7 x 10-8 psi/in3/s-1) per mm length of seal circumference
- Excellent wear and friction characteristics
- Compatible with virtually all chemicals
- Available in standard and custom seal designs
Turcon® Variseal® Ultra-Clean™
This seal offers the ultimate in cleanliness, making it ideal for use in processing equipment where maintaining an ultra-clean system is top priority. In the unique design of Turcon® Variseal® Ultra-Clean™, the spring required to activate the seal is fully enclosed within a Turcon® case. This means metal extractables are totally excluded, an important factor in semiconductor fabrication where the minutest contamination can destroy the effectiveness of wafers.
Features of the Turcon® Variseal® Ultra-Clean™ seal:
- Operates in extreme temperatures from -253 °C / -423 °F to +260 °C / +500 °F
- Withstands high pressures in excess of 100 bar / 1450 psi
- Excellent wear and friction characteristics
- Compatible with virtually all media
- Suitable for piston, rod, face rotary, reciprocating and static situations
- Easy retrofit into standard AS-568 O-Ring and Variseal® grooves
